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International Conference on Reactive Sputter Deposition 2023

Organized by the IOM Leipzig

December 12-13, Leipzig, Germany

Invited speakers

Sebastian Ekeroth

Linköping University, Sweden

"High-power pulsed hollow cathode sputtering for high-rate growth of complex nanoparticles and nanostructures"

Abstract

Tomas Kozak

University of West Bohemia, Pilsen, Czech Republic

"Modelling of reactive HiPIMS discharges: parametric, ionization-region and particle-based approaches"

Abstract

Sebastian Siol

Empa – Swiss Federal Laboratories for Materials Science and Technology, Dübendorf, Switzerland

"Combinatorial Reactive Sputtering with Auger Parameter Analysis enables Synthesis of Wurtzite Zn2TaN3"

Abstract

Alexander Vahl

Christian-Albrechts-Universität zu Kiel (CAU), Germany

"Reactive Sputter Deposition for Functional Thin Films: From Photocatalysis to Bio-inspired Electronic Device"

Abstract

Contact

Leibniz Institute of Surface Engineering (IOM)
Permoserstr. 15
04318 Leipzig / Germany

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    International Conference on Reactive Sputter Deposition RSD

    Organized by the IOM Leipzig

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